1 September 1996 Gaussian pupil for superresolution at soft x-ray wavelength
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Proceedings Volume 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology; 27781K (1996) https://doi.org/10.1117/12.2298938
Event: 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 1996, Taejon, Korea, Republic of
Abstract
By using Gaussian pupil, the resolution limit eG can be made less than Rayligh's limit of resolution ER. The Gaussian form of the amplitude impulse Uo(x) is initially defined by e 'x2 and by Fourier transform relation the pupil function A(w) is obtained and then the amplitude impulse U(x) is derived for a finite aperture. It is shown EG is < 1/2 radius of the Airy disk = 1/2 ER in the system of NA=0.25 and 2=130nm(Soft X-ray). Also, it is shown the OTF of the annular Gaussian aperture depends only on the outer diameter of the pupil, which is a special feature of the Gaussian pupil. , .
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Young Ran Song, Young Ran Song, } "Gaussian pupil for superresolution at soft x-ray wavelength", Proc. SPIE 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 27781K (1 September 1996); doi: 10.1117/12.2298938; https://doi.org/10.1117/12.2298938
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