Using of vitreous chalcogenide semiconductors in microelectronic fabrication

Lev M. Panasyuk

doi:10.1117/12.2298941

1 September 1996 Using of vitreous chalcogenide semiconductors in microelectronic fabrication

Lev M. Panasyuk

Proceedings Volume 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology; 27781N (1996) https://doi.org/10.1117/12.2298941
Event: 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 1996, Taejon, Korea, Republic of

Abstract

This report describes the application of thin film Vitreous Chalcogenide Semiconduc- tors (VCS) for high resolution recording of the integrated elements. The processes of selective chemical etching of VCS layers are investigated both of the exposure conditions and parameter of etching solution.

Citation Download Citation

Lev M. Panasyuk "Using of vitreous chalcogenide semiconductors in microelectronic fabrication", Proc. SPIE 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 27781N (1 September 1996); https://doi.org/10.1117/12.2298941

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