1 September 1996 Using of vitreous chalcogenide semiconductors in microelectronic fabrication
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Proceedings Volume 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology; 27781N (1996) https://doi.org/10.1117/12.2298941
Event: 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 1996, Taejon, Korea, Republic of
Abstract
This report describes the application of thin film Vitreous Chalcogenide Semiconduc- tors (VCS) for high resolution recording of the integrated elements. The processes of selective chemical etching of VCS layers are investigated both of the exposure conditions and parameter of etching solution.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Lev M. Panasyuk, Lev M. Panasyuk, } "Using of vitreous chalcogenide semiconductors in microelectronic fabrication", Proc. SPIE 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 27781N (1 September 1996); doi: 10.1117/12.2298941; https://doi.org/10.1117/12.2298941
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