1 September 1996 Optical surface topography measurements and characterization
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Proceedings Volume 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology; 27781X (1996) https://doi.org/10.1117/12.2298951
Event: 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 1996, Taejon, Korea, Republic of
Abstract
For surface topography measurement and characterization it is necessary to calibrate the measuring devices. For comparison of measurements using different techniques it is important to specify the spatial frequency range of the microstructure. Two new methods for the measurements of surface shape and microstructure will be described; namely a confocal technique based on microlens arrays and an interferometrical technique based on heterodyne interferometry.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
H. J. Tiziani, "Optical surface topography measurements and characterization", Proc. SPIE 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 27781X (1 September 1996); doi: 10.1117/12.2298951; https://doi.org/10.1117/12.2298951
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