1 September 1996 Assembly and adjustment of a lithographic lens
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Proceedings Volume 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology; 27781Z (1996) https://doi.org/10.1117/12.2298953
Event: 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 1996, Taejon, Korea, Republic of
Abstract
The imaging performance of projection lenses is strongly influenced by the used tools and procedures of assembly and adjustment. This paper presents the experience we have, using the example of a wide-field g-line lens.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
U. Kruger, U. Kruger, "Assembly and adjustment of a lithographic lens", Proc. SPIE 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 27781Z (1 September 1996); doi: 10.1117/12.2298953; https://doi.org/10.1117/12.2298953
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