1 September 1996 Three-dimensional microfabrication with two-photon absorbed photopolymerization
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Proceedings Volume 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology; 277829 (1996) https://doi.org/10.1117/12.2298963
Event: 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 1996, Taejon, Korea, Republic of
Abstract
Fabrication technology for three-dimensional microstructures with submicrometer accuracy has been needed in the fields of modern optics, such as micro mechanical system driven with photon pressure[1, 2] and laser-trapping near-filed optical microscopy[3]. However, the present accuracy with stereolithography[4] is not yet satisfactory to this purpose. Moreover, it is not so flexible to make a three- dimensional structure with the present technique. In this paper, we propose a new microfabrication method in which a point in three-dimensional volume of UV photopolymerizing resin is photopolymerized through two-photon absorption process. The microfabrication with two-photon absorption drastically improves the depth resolution due to a nonlinearlity between the power of the irradiation and that of the absorption[5].
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Shoji Maruo, Shoji Maruo, } "Three-dimensional microfabrication with two-photon absorbed photopolymerization", Proc. SPIE 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 277829 (1 September 1996); doi: 10.1117/12.2298963; https://doi.org/10.1117/12.2298963
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