Advanced concepts of laser beam integration by beamlet shaping

E. W. Kreutz

doi:10.1117/12.2298964

1 September 1996 Advanced concepts of laser beam integration by beamlet shaping

E. W. Kreutz

Proceedings Volume 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology; 27782A (1996) https://doi.org/10.1117/12.2298964
Event: 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 1996, Taejon, Korea, Republic of

Abstract

Many applications of micromachining with laser radiation require homogenous illumination of a mask or a workpiece or even illumination by a process adapted power density distribution. Especially, in laser structuring of surfaces e. g. photolithography or ablation the power density distribution significantly influences the processing result. Thus, process adapted beam shaping becomes an important task for the optimization of the beam delivery system. The most prominent problem especially for mask imaging with UV laser radiation is the generation of power density distributions, which are adapted to the mask geometry in order to improve the processing efficiency considerably. No satisfactory concepts exist for the generation of arbitrary processing adapted power density distributions. Beam shaping with conventional holographic devices shows a pronounced dependence of the resulting distribution on energy fluence and phase distribution of the incident beam. Thus, a sufficient quality of the processing result cannot be assured. The analysis for the performance of the beam shaping by multifaceted imaging and non-imaging integrators with respect to the statistical properties of the incident laser radiation is reported using advanced beam shaping [1].

Citation Download Citation

E. W. Kreutz "Advanced concepts of laser beam integration by beamlet shaping", Proc. SPIE 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 27782A (1 September 1996); https://doi.org/10.1117/12.2298964

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