1 September 1996 Simultaneous inspection of surface roughness and flatness by computer-generated hologram
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Proceedings Volume 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology; 27782D (1996) https://doi.org/10.1117/12.2298967
Event: 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 1996, Taejon, Korea, Republic of
Abstract
A sensor array for surface curvature and roughness inspection is investigated. The sensor is based on the use of a computer-generated hologram as an analyser of surface curvature and roughness. The sensor can be exploited to estimate the optical surface roughness of irregularly curved surfaces. A contrast parameter to characterize the optical surface roughness is introduced.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Eric W. Rogala, "Simultaneous inspection of surface roughness and flatness by computer-generated hologram", Proc. SPIE 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 27782D (1 September 1996); doi: 10.1117/12.2298967; https://doi.org/10.1117/12.2298967
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