1 September 1996 An intelligent system for the measurement of surface microstructure
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Proceedings Volume 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology; 27782G (1996) https://doi.org/10.1117/12.2298970
Event: 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 1996, Taejon, Korea, Republic of
Abstract
We have developed an intelligent surface profilometry, with vertical resolution of 0.3nm, lateral resolution of 0.93 μm and testing accuracy of 0.5nm. This system can provide not only 2-D and 3-D topographies of testing surface, but also different evaluation parameters of surface roughness. In our system a feedback-control is implemented for phase shifting, and therefore problems encountered in the piezoelectric transducer are overcome. Comments on interferometer design and experimental examples are given in our paper.
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Zhihua Ding, Zhihua Ding, } "An intelligent system for the measurement of surface microstructure", Proc. SPIE 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 27782G (1 September 1996); doi: 10.1117/12.2298970; https://doi.org/10.1117/12.2298970
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