1 September 1996 Water absorption on the polished stainless steel surface studied by ellipsometry
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Proceedings Volume 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology; 27783B (1996) https://doi.org/10.1117/12.2299001
Event: 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 1996, Taejon, Korea, Republic of
Abstract
A photoelastic modulation (PEM) ellipsometry is employed to study a water adsorption on SUS 310 surface in air as a function of relative humidity change. A natural evaporation type humidity generation method and a divided-flow type humidity generator is used to control the humidity in a chamber in room temperature condition. Detected signal shows strong ties to room temperature fluctuations and drift of optical properties of ellipsometric components including light source. Under even such a rough environment, adsorption occured and optical response is detected as relative humidity changes.
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Hyunsoo Nham, Hyunsoo Nham, } "Water absorption on the polished stainless steel surface studied by ellipsometry", Proc. SPIE 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 27783B (1 September 1996); doi: 10.1117/12.2299001; https://doi.org/10.1117/12.2299001
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