Profilometry of a plane reflecting surface using a confocal scanning optical microscope

D. M. Gale

doi:10.1117/12.2299011

1 September 1996 Profilometry of a plane reflecting surface using a confocal scanning optical microscope

D. M. Gale

Proceedings Volume 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology; 27783L (1996) https://doi.org/10.1117/12.2299011
Event: 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 1996, Taejon, Korea, Republic of

Abstract

Numerical studies of the performance of a one-dimensional Confocal Scanning Optical Microscope (CSOM) used as a profiler of highly reflecting surfaces have shown that the microscope suffers a degradation in performance for surfaces with high slope or discontinuities. These studies have serious implications for the use of the CSOM as a non-contact surface profiler. We will present an experimental study of the response of a CSOM to simple plane reflecting surfaces with varying degrees of tilt, with emphasis on the depth discrimination property and the ability of the instrument to accurately profile such objects.

Citation Download Citation

D. M. Gale "Profilometry of a plane reflecting surface using a confocal scanning optical microscope", Proc. SPIE 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 27783L (1 September 1996); https://doi.org/10.1117/12.2299011

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