1 September 1996 Profilometry of a plane reflecting surface using a confocal scanning optical microscope
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Proceedings Volume 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology; 27783L (1996) https://doi.org/10.1117/12.2299011
Event: 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 1996, Taejon, Korea, Republic of
Abstract
Numerical studies of the performance of a one-dimensional Confocal Scanning Optical Microscope (CSOM) used as a profiler of highly reflecting surfaces have shown that the microscope suffers a degradation in performance for surfaces with high slope or discontinuities. These studies have serious implications for the use of the CSOM as a non-contact surface profiler. We will present an experimental study of the response of a CSOM to simple plane reflecting surfaces with varying degrees of tilt, with emphasis on the depth discrimination property and the ability of the instrument to accurately profile such objects.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
D. M. Gale, "Profilometry of a plane reflecting surface using a confocal scanning optical microscope", Proc. SPIE 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 27783L (1 September 1996); doi: 10.1117/12.2299011; https://doi.org/10.1117/12.2299011
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