1 September 1996 Examination of photodoping phenomenon by in-situ ellipsometric observation
Author Affiliations +
Proceedings Volume 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology; 27783R (1996) https://doi.org/10.1117/12.2299017
Event: 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 1996, Taejon, Korea, Republic of
Abstract
Phenomenon due to Ag photodoping into amorphous As2S3 was examined with an ellipsometric method. Obtained values of ellipsometric parameters Ψ and ∆ were fitted by using multilayer model. It was found that each thickness of Ag, Ag:As2S3 and As2S3 layers showed a time dependent change during the diffusion process in photodoping and the optical constants of As2S3 change remarkably by Ag photodoping. These behaviors were explained in relation with photodoping mechanism.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
J. Lee, "Examination of photodoping phenomenon by in-situ ellipsometric observation", Proc. SPIE 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 27783R (1 September 1996); doi: 10.1117/12.2299017; https://doi.org/10.1117/12.2299017
PROCEEDINGS
2 PAGES


SHARE
Back to Top