1 September 1996 High resolution 3D laser interferometer with reduced linearity error
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Proceedings Volume 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology; 277848 (1996) https://doi.org/10.1117/12.2299034
Event: 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 1996, Taejon, Korea, Republic of
Abstract
We describe an interferometer-system for simultaneously displacement and tilt measurement that satisfies present need of high accuracy and high resolution in the sub-nm and sub aresecond range. This accuracy mainly requires the determination and correction of three major error sources in optical interferometry: Abbe offset error, changes of the refractive index of air and cyclic errors in phase detection.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Bernhard Hils, Bernhard Hils, } "High resolution 3D laser interferometer with reduced linearity error", Proc. SPIE 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 277848 (1 September 1996); doi: 10.1117/12.2299034; https://doi.org/10.1117/12.2299034
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