1 September 1996 A new method of high accuracy dynamic positioning using diode lasers
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Proceedings Volume 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology; 27786U (1996) https://doi.org/10.1117/12.2299129
Event: 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 1996, Taejon, Korea, Republic of
Abstract
With liner frequency modulation property of a diode laser and the technique of dual-wavelength fine division, the zero OPD point of an interferometer is dynamically searched with a very high accuracy of 0.015 micrometer. Compared to that of the traditional white light positioning, the interferometer of diode laser positioning is simplified, and the searching range of the zero OPD point has been increased greatly.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jinsong Han, Jinsong Han, } "A new method of high accuracy dynamic positioning using diode lasers", Proc. SPIE 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 27786U (1 September 1996); doi: 10.1117/12.2299129; https://doi.org/10.1117/12.2299129
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