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1 September 1996 XeCl excimer laser with high repetition rate and low divergence beam
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Proceedings Volume 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology; 27789X (1996) https://doi.org/10.1117/12.2316046
Event: 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 1996, Taejon, Korea, Republic of
Abstract
Configuration and performance of a high repetition rate XeCl excimer laser are reported. The laser maximum output energy is 415 mJ. Maximum average power is 35 W at repetition rate of 110 Hz. When unstable resonator optics are adopted on the laser. Beam divergence are improved about 10 times but expense of output energy in 30%.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yingzi Nan "XeCl excimer laser with high repetition rate and low divergence beam", Proc. SPIE 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 27789X (1 September 1996); https://doi.org/10.1117/12.2316046
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