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1 September 1996 Large field of view surface microstructure measurements
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Proceedings Volume 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology; 2778FY (1996) https://doi.org/10.1117/12.2316263
Event: 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 1996, Taejon, Korea, Republic of
Abstract
This paper describes a computerized interferometric microscope system for the measurement of surface microstructure in which high spatial resolution, small field of view (FOV), measurements of surface microstructure are stitched together to give highly accurate large FOV maps of surface microstructure. A FOV of several millimeters having micron spatial resolution and nanometer or better height resolution can be obtained.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
James C. Wyant "Large field of view surface microstructure measurements", Proc. SPIE 2778, 17th Congress of the International Commission for Optics: Optics for Science and New Technology, 2778FY (1 September 1996); https://doi.org/10.1117/12.2316263
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