Paper
26 April 1996 Direct formation of GaAs quantum dot structure by droplet epitaxy
Nobuyuki Koguchi, Keiko Ishige
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Abstract
Numerous GaAs epitaxial microcrystals were fabricated on a sulfur-terminated GaAs substrate by sequentially supplying Ga and As molecular beam. The process consists of forming Ga droplets on the inert surface and reacting the droplets with As to produce GaAs microcrystals. This method termed droplet epitaxy is thought to be a promising growth method for fabricating the GaAs quantum dot structure, especially coupled quantum dot structure.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Nobuyuki Koguchi and Keiko Ishige "Direct formation of GaAs quantum dot structure by droplet epitaxy", Proc. SPIE 2779, 3rd International Conference on Intelligent Materials and 3rd European Conference on Smart Structures and Materials, (26 April 1996); https://doi.org/10.1117/12.237054
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KEYWORDS
Gallium

Gallium arsenide

Molecular beams

Quantum dots

Chemical species

Epitaxy

Diffraction

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