Piezoelectric and electrostrictive bimorph actuators and sensors for smart microsystems

Philippe Gaucher

doi:10.1117/12.237025

26 April 1996 Piezoelectric and electrostrictive bimorph actuators and sensors for smart microsystems

Philippe Gaucher

Proceedings Volume 2779, 3rd International Conference on Intelligent Materials and 3rd European Conference on Smart Structures and Materials; (1996) https://doi.org/10.1117/12.237025
Event: 3rd International Conference on Intelligent Materials, 1996, Lyon, France

Abstract

Piezoelectric materials (PZ-PT 50-50, PMN-PT 65-35) and electrostrictive materials (PMN- PT 90-10) are potential candidates for the future integrated micro-systems because of their high dielectric constant and elastic modulus. They can be used in a cantilever laminated structure for active vibration control, smart acoustic sensors and agile transducers. The first stage of the study has been made with screen printed thick films: modeling of transfer functions of sensor and actuator is made by analytical methods and experimentation of closed loop regulation is shown on a 15 mm long device. The second stage is the miniaturization of the device on silicon substrate by using sol-gel deposition, microlithography and wet etching. The modeling of a 10 times smaller device is made with data coming from experimental measurements on thin films. Expected deviations and sensitivities are calculated with the same model as above.

Citation Download Citation

Philippe Gaucher "Piezoelectric and electrostrictive bimorph actuators and sensors for smart microsystems", Proc. SPIE 2779, 3rd International Conference on Intelligent Materials and 3rd European Conference on Smart Structures and Materials, (26 April 1996); https://doi.org/10.1117/12.237025

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available