26 April 1996 Piezoelectric and electrostrictive bimorph actuators and sensors for smart microsystems
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Abstract
Piezoelectric materials (PZ-PT 50-50, PMN-PT 65-35) and electrostrictive materials (PMN- PT 90-10) are potential candidates for the future integrated micro-systems because of their high dielectric constant and elastic modulus. They can be used in a cantilever laminated structure for active vibration control, smart acoustic sensors and agile transducers. The first stage of the study has been made with screen printed thick films: modeling of transfer functions of sensor and actuator is made by analytical methods and experimentation of closed loop regulation is shown on a 15 mm long device. The second stage is the miniaturization of the device on silicon substrate by using sol-gel deposition, microlithography and wet etching. The modeling of a 10 times smaller device is made with data coming from experimental measurements on thin films. Expected deviations and sensitivities are calculated with the same model as above.
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Philippe Gaucher, Philippe Gaucher, "Piezoelectric and electrostrictive bimorph actuators and sensors for smart microsystems", Proc. SPIE 2779, 3rd International Conference on Intelligent Materials and 3rd European Conference on Smart Structures and Materials, (26 April 1996); doi: 10.1117/12.237025; https://doi.org/10.1117/12.237025
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