Paper
26 April 1996 Research project on nanospace laboratory and related topics
Isao Yamada
Author Affiliations +
Abstract
The research project on Nano-Space Laboratory and related topics are reviewed. This project has been funded by the Special Coordination Funds for Promoting Science and Technology since 1994. The project is classified into three major topics: (1) materials development by atom lab, (2) materials development by molecular lab and (3) development of theory and basic technology for nano-space research. The paper describes progress of the research with emphasis placed especially on new process technologies.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Isao Yamada "Research project on nanospace laboratory and related topics", Proc. SPIE 2779, 3rd International Conference on Intelligent Materials and 3rd European Conference on Smart Structures and Materials, (26 April 1996); https://doi.org/10.1117/12.237049
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KEYWORDS
Chemical species

Crystals

Ion beams

Nanotechnology

Analytical research

Interfaces

Solids

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