8 April 1996 Aging of metal/hard-carbon films
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Proceedings Volume 2780, Metal/Nonmetal Microsystems: Physics, Technology, and Applications; (1996) https://doi.org/10.1117/12.238131
Event: Metal/Nonmetal Microsystems: Physics, Technology, and Applications, 1995, Polanica Zdroj, Poland
Abstract
Unbalanced electromagnetron operated in Ar/n-hexane mixture was employed for deposition of composite Ag/C:H films. For comparison composite Ni/C:H films were prepared in a similar way using unbalanced planar magnetron with permanent magnets. Optical transmission measurements, TEM micrographs, and dc electrical measurements, were used to study ageing effects of the composites in the ambient atmosphere.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Hynek Biederman, Hynek Biederman, Pavel Hlidek, Pavel Hlidek, Josef Pesicka, Josef Pesicka, Danka Slavinska, Danka Slavinska, Virgilijus Stundzia, Virgilijus Stundzia, Joseph Zemek, Joseph Zemek, } "Aging of metal/hard-carbon films", Proc. SPIE 2780, Metal/Nonmetal Microsystems: Physics, Technology, and Applications, (8 April 1996); doi: 10.1117/12.238131; https://doi.org/10.1117/12.238131
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