8 April 1996 Capability of piezoceramic-driven probe techniques for manufacturing of nanostructures
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Proceedings Volume 2780, Metal/Nonmetal Microsystems: Physics, Technology, and Applications; (1996) https://doi.org/10.1117/12.238196
Event: Metal/Nonmetal Microsystems: Physics, Technology, and Applications, 1995, Polanica Zdroj, Poland
Abstract
This contribution is concerned with the question of if the scanning tunneling microscope (STM) or possibly its relatives out of the group of the diverse scanning probe microscopes (SPM) developed in recent years are reliable tools for atomic scale -- or at least nanometric -- modifications of solid state surfaces or for building structures on it, especially for various purposes like (1) high-density memory storage, (2) nanolithography, or more general: (3) nanofabrication and (4) atom and molecule manipulation. From these points of view the last years results are reviewed.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Herbert Pagnia, Herbert Pagnia, } "Capability of piezoceramic-driven probe techniques for manufacturing of nanostructures", Proc. SPIE 2780, Metal/Nonmetal Microsystems: Physics, Technology, and Applications, (8 April 1996); doi: 10.1117/12.238196; https://doi.org/10.1117/12.238196
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