8 April 1996 Influence of microstructure on electrical properties of discontinuous Mn films
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Proceedings Volume 2780, Metal/Nonmetal Microsystems: Physics, Technology, and Applications; (1996) https://doi.org/10.1117/12.238153
Event: Metal/Nonmetal Microsystems: Physics, Technology, and Applications, 1995, Polanica Zdroj, Poland
Abstract
Mn discontinuous films with different thicknesses d were evaporated onto quartz-glass substrates at different temperatures under vacuum conditions (p equals 10-8 Torr). The microstructures and crystallographic orientations were examined with high resolution electron microscope. On the basis of the diffraction patterns the contents of islands and their influence on the electrical properties were determined. The temperature dependencies of resistance R(T) were measured in vacuo in situ for the Mn films with different thicknesses. Making use of the measured data the activation energies of resistance E were calculated for the films with different thicknesses and for the films obtained under different evaporation conditions.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Piotr Bieganski, Piotr Bieganski, E. Dobierzewska-Mozrzymas, E. Dobierzewska-Mozrzymas, E. Pieciul, E. Pieciul, Jacek Wojcik, Jacek Wojcik, } "Influence of microstructure on electrical properties of discontinuous Mn films", Proc. SPIE 2780, Metal/Nonmetal Microsystems: Physics, Technology, and Applications, (8 April 1996); doi: 10.1117/12.238153; https://doi.org/10.1117/12.238153
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