8 April 1996 Morphological characteristics of thin metal films
Author Affiliations +
Proceedings Volume 2780, Metal/Nonmetal Microsystems: Physics, Technology, and Applications; (1996) https://doi.org/10.1117/12.238197
Event: Metal/Nonmetal Microsystems: Physics, Technology, and Applications, 1995, Polanica Zdroj, Poland
The initial stages of growth of thin metal films in both two-dimensions (discontinuous metal films on dielectric substrates) and three-dimensions (plasmachemically prepared composite films with metal islands located in the dielectric matrix) are studied by the combination of direct measurement and modeling. For the analysis of film photographs from transmission electron microscope and for the description of spatial distribution of objects the methods of mathematical morphology were used, the special attention being devoted to the covariance method. The interpretation of the derived characteristics and the extension of the analysis for composite films was performed by the computer experiment, while simulated micrographs with known distribution of objects were processed by the same morphological algorithms as experimental data.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Rudolf Hrach, Rudolf Hrach, Dusan Novotny, Dusan Novotny, Stanislov Novak, Stanislov Novak, Jaroslav Pavlik, Jaroslav Pavlik, "Morphological characteristics of thin metal films", Proc. SPIE 2780, Metal/Nonmetal Microsystems: Physics, Technology, and Applications, (8 April 1996); doi: 10.1117/12.238197; https://doi.org/10.1117/12.238197

Back to Top