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8 April 1996 Screen-printed silicon solar cells with texturized and passivated emitter diffused from spin-on phosphorous source
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Proceedings Volume 2780, Metal/Nonmetal Microsystems: Physics, Technology, and Applications; (1996) https://doi.org/10.1117/12.238168
Event: Metal/Nonmetal Microsystems: Physics, Technology, and Applications, 1995, Polanica Zdroj, Poland
Abstract
Spin-on phosphorus diffusion source has been used for emitter formation in silicon solar cells. It is shown that commercially available phosphorosilicamer emulsion used for that purpose can be easily modified by adding alcohol solution of P2O5 thus allowing us to obtain junctions with different dopant profiles for the same process conditions. SIMS curves have been taken for several samples and compared with theoretical simulation of diffusion profile showing that diffusion driven from spin-on source may strongly differ from that carried out from classic POCl3 source. Results of some experiments on emitter passivation by simple dry oxidation are also presented.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Tadeusz Zdanowicz and Marek Lipinski "Screen-printed silicon solar cells with texturized and passivated emitter diffused from spin-on phosphorous source", Proc. SPIE 2780, Metal/Nonmetal Microsystems: Physics, Technology, and Applications, (8 April 1996); https://doi.org/10.1117/12.238168
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