18 September 1996 Acoustic control of tip-sample distance for optical near-field microscopy
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Proceedings Volume 2782, Optical Inspection and Micromeasurements; (1996) https://doi.org/10.1117/12.250783
Event: Lasers, Optics, and Vision for Productivity in Manufacturing I, 1996, Besancon, France
A new tip-distance control based on near-field acoustics is presented. The interaction between a vibrating tip and the sample enables high accuracy estimation of the distance variation (typically better than 1 nm with a fiber tip). The paper describes the physical interaction between vibrating tip and the object, the principle of regulation loop and shows experimental results obtained in the case of an optical fiber tip used in near-field optical microscopy. The proposed technique can be used to image the topography of the sample or to characterize coupling gas or fluid.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Bernard Cretin, Bernard Cretin, Etienne Farnault, Etienne Farnault, } "Acoustic control of tip-sample distance for optical near-field microscopy", Proc. SPIE 2782, Optical Inspection and Micromeasurements, (18 September 1996); doi: 10.1117/12.250783; https://doi.org/10.1117/12.250783

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