Determination of the resolution in scanning near-field optical images with the help of shear force feedback

Dominique Barchiesi; Christian Pieralli

doi:10.1117/12.250782

18 September 1996 Determination of the resolution in scanning near-field optical images with the help of shear force feedback

Dominique Barchiesi, Christian Pieralli

Author Affiliations +

Proceedings Volume 2782, Optical Inspection and Micromeasurements; (1996) https://doi.org/10.1117/12.250782
Event: Lasers, Optics, and Vision for Productivity in Manufacturing I, 1996, Besancon, France

Abstract

One of the challenges for newly born probe microscopies is the estimation of their capabilities. The latter is closely related to the reachable resolution. We present a method adapted to these microscopies for determining resolution. It is applied to Reflection Scanning Near-field Optical Microscopy combined with shear-force (ShF) feedback but the method is quite general. The resolution is deduced from the comparison of the optical data spectrum to the shear force data one. Indeed, it is well known that spatial resolution of shear force is better than that of optical microscope and the optical resolution can thus be estimated through this comparison. Actually, the considered set-up uses ShF feedback. Quantitative results are given either with periodic or non periodic objects.

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Dominique Barchiesi and Christian Pieralli "Determination of the resolution in scanning near-field optical images with the help of shear force feedback", Proc. SPIE 2782, Optical Inspection and Micromeasurements, (18 September 1996); https://doi.org/10.1117/12.250782

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