18 September 1996 Displacement field measurement in the nanometer range
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Proceedings Volume 2782, Optical Inspection and Micromeasurements; (1996) https://doi.org/10.1117/12.250749
Event: Lasers, Optics, and Vision for Productivity in Manufacturing I, 1996, Besancon, France
Abstract
The grid method is a classical tool for displacement measurement, which provides field data. This method has benefited very much from the phase-shifting technique in recent years. Two examples of applications of this method in the nanometer range are presented. The first one concerns the materials science: it is shown that microgrids observed by SEM can provide displacement field data with an accuracy of a few nanometers. The second one concerns the measurement of a rigid-body displacement. In this case, displacement data can be averaged over the whole field, drastically increasing the sensitivity. It is shown that a sensitivity of 7 nm can be achieved by using a coarse grid with 8 lines per mm. This sensitivity corresponds to 1/18000 of the grid pitch.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yves Surrel, Nicolas Fournier, "Displacement field measurement in the nanometer range", Proc. SPIE 2782, Optical Inspection and Micromeasurements, (18 September 1996); doi: 10.1117/12.250749; https://doi.org/10.1117/12.250749
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