18 September 1996 High-reflectivity surface evaluation in Fizeau phase-stepping interferometry with a Ronchi grid as phase modulator
Author Affiliations +
Proceedings Volume 2782, Optical Inspection and Micromeasurements; (1996) https://doi.org/10.1117/12.250752
Event: Lasers, Optics, and Vision for Productivity in Manufacturing I, 1996, Besancon, France
Abstract
The topographic measurement of high reflectivity test surfaces in a Fizeau interferometer using different two-beam phase-stepping algorithms (TBPSA's) is presented. Low pass- filtering the superposition of a multiple-beam Fizeau pattern and a Ronchi grid renders a pattern of sinusoidal profile (the moire image) that contains the Fizeau phase and that can be phase modulated by the in-plane translation of the grid. A set of these phase-shifted moire images can be combined in different TBPSA's in order to calculate the Fizeau phase making clear, at the same time, the sensitivity of the method to use the main phase error sources.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Benito Vasquez Dorrio, Benito Vasquez Dorrio, J. Bugarin, J. Bugarin, Jose M. Alen, Jose M. Alen, Antonio Fernandez, Antonio Fernandez, Angel F. Doval, Angel F. Doval, Jose Carlos Lopez Vazquez, Jose Carlos Lopez Vazquez, Jesus Blanco-Garcia, Jesus Blanco-Garcia, J. L. Fernandez, J. L. Fernandez, Mariano Perez-Amor, Mariano Perez-Amor, } "High-reflectivity surface evaluation in Fizeau phase-stepping interferometry with a Ronchi grid as phase modulator", Proc. SPIE 2782, Optical Inspection and Micromeasurements, (18 September 1996); doi: 10.1117/12.250752; https://doi.org/10.1117/12.250752
PROCEEDINGS
9 PAGES


SHARE
Back to Top