Lithography on PMMA-DR1 with reflection near-filed optical microscopy (R-SNOM) and probe characterization

Stephane Davy; G. Rachard; Michel Spajer

doi:10.1117/12.250784

18 September 1996 Lithography on PMMA-DR1 with reflection near-field optical microscopy (R-SNOM) and probe characterization

Stephane Davy, G. Rachard, Michel Spajer

Author Affiliations +

Proceedings Volume 2782, Optical Inspection and Micromeasurements; (1996) https://doi.org/10.1117/12.250784
Event: Lasers, Optics, and Vision for Productivity in Manufacturing I, 1996, Besancon, France

Abstract

We propose a method of scanning near field optical lithography where the result of the process is controlled in quasi real time. Irradiation of the polymer involves a topographic modification of the layer. It is detected mechanically by the fiber tip, which plays the role of a nanosource and of shear force probe. A single snapshot gives an image of the intensity distribution around the tip. A resolution better than 100 nm is obtained even with dielectric tips.

Citation Download Citation

Stephane Davy, G. Rachard, and Michel Spajer "Lithography on PMMA-DR1 with reflection near-field optical microscopy (R-SNOM) and probe characterization", Proc. SPIE 2782, Optical Inspection and Micromeasurements, (18 September 1996); https://doi.org/10.1117/12.250784

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