Measuring the deformations of a scattering surface with a general purpose interferometer

Marcelo Trivi; Vincenzo Greco; Lois M. Hoffer; Giuseppe Molesini

doi:10.1117/12.250810

18 September 1996 Measuring the deformations of a scattering surface with a general purpose interferometer

Marcelo Trivi, Vincenzo Greco, Lois M. Hoffer, Giuseppe Molesini

Proceedings Volume 2782, Optical Inspection and Micromeasurements; (1996) https://doi.org/10.1117/12.250810
Event: Lasers, Optics, and Vision for Productivity in Manufacturing I, 1996, Besancon, France

Abstract

The present work demonstrates the use of a general purpose interferometer to measure the deformations of a scattering surface by processing speckle patterns instead of smooth wavefronts. The operation of the interferometer are re- programmed to include algorithms adapted to handling speckle patterns. Details of the measuring operation are described, limits of applicability are discussed, and experimental results are presented.

Citation Download Citation

Marcelo Trivi, Vincenzo Greco, Lois M. Hoffer, and Giuseppe Molesini "Measuring the deformations of a scattering surface with a general purpose interferometer", Proc. SPIE 2782, Optical Inspection and Micromeasurements, (18 September 1996); https://doi.org/10.1117/12.250810

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