18 September 1996 Measuring the deformations of a scattering surface with a general purpose interferometer
Author Affiliations +
Proceedings Volume 2782, Optical Inspection and Micromeasurements; (1996) https://doi.org/10.1117/12.250810
Event: Lasers, Optics, and Vision for Productivity in Manufacturing I, 1996, Besancon, France
The present work demonstrates the use of a general purpose interferometer to measure the deformations of a scattering surface by processing speckle patterns instead of smooth wavefronts. The operation of the interferometer are re- programmed to include algorithms adapted to handling speckle patterns. Details of the measuring operation are described, limits of applicability are discussed, and experimental results are presented.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Marcelo Trivi, Marcelo Trivi, Vincenzo Greco, Vincenzo Greco, Lois M. Hoffer, Lois M. Hoffer, Giuseppe Molesini, Giuseppe Molesini, } "Measuring the deformations of a scattering surface with a general purpose interferometer", Proc. SPIE 2782, Optical Inspection and Micromeasurements, (18 September 1996); doi: 10.1117/12.250810; https://doi.org/10.1117/12.250810

Back to Top