18 September 1996 Micromeasurements: a challenge for photomechanics
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Proceedings Volume 2782, Optical Inspection and Micromeasurements; (1996) https://doi.org/10.1117/12.250743
Event: Lasers, Optics, and Vision for Productivity in Manufacturing I, 1996, Besancon, France
Abstract
Modern Micro Electro Mechanical Systems (MEMS) place ever increasing dependence on miniaturization of components and rely on computational and experimental methods to reach their objectives. This miniaturization requires a detailed knowledge of micromechanical behavior of materials used in development of the components and emphasizes design validation of finished products. This information is provided by electronic holography and grating interferometry used as full field, noninvasive experimental techniques. The usefulness of these methods is shown on several examples including determination of local material properties, stress, relaxation of microelements and dynamic characteristic study of MEMS.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Malgorzata Kujawinska, Malgorzata Kujawinska, Ryszard J. Pryputniewicz, Ryszard J. Pryputniewicz, } "Micromeasurements: a challenge for photomechanics", Proc. SPIE 2782, Optical Inspection and Micromeasurements, (18 September 1996); doi: 10.1117/12.250743; https://doi.org/10.1117/12.250743
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