18 September 1996 New heterodyne interferometers using double passing
Author Affiliations +
Proceedings Volume 2782, Optical Inspection and Micromeasurements; (1996) https://doi.org/10.1117/12.250777
Event: Lasers, Optics, and Vision for Productivity in Manufacturing I, 1996, Besancon, France
In two-arms interferometers, spurious beams are often cause of instabilities. Resulting multiple-beam interference limit the probe sensitivity. Optical components are usually added to spatially shift or to suppress these `spurious beams' returning inside the interferometer. Experimentally, we have shown that the so-called `spurious beams' returning towards the laser can be successfully used to obtain stable interference. So, we have developed new structures of interferometers based on the reflection of a returning beam on the high-quality front mirror of He-Ne laser. The new structures present several advantages compared with classical interferometers (Michelson or Mach-Zehnder, e.g.). They are more simple and, at least, the same sensitivity has been measured. Alignment is simplified and power balancing is very easy.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Pascal Vairac, Pascal Vairac, Bernard Cretin, Bernard Cretin, } "New heterodyne interferometers using double passing", Proc. SPIE 2782, Optical Inspection and Micromeasurements, (18 September 1996); doi: 10.1117/12.250777; https://doi.org/10.1117/12.250777

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