18 September 1996 Nondestructive evaluation of material structure by second harmonic generation
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Proceedings Volume 2782, Optical Inspection and Micromeasurements; (1996) https://doi.org/10.1117/12.250809
Event: Lasers, Optics, and Vision for Productivity in Manufacturing I, 1996, Besancon, France
Abstract
Second harmonic generation can be used to probe the microstructure of materials. This non-destructive all- optical method is applied to quantify the orientation of the micro-columns constituting aluminium nitride thin films. Very small tilt angles of the columns are easily detectable. This technique is applicable to the control of material structure during deposition.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Daniele Blanc, Daniele Blanc, Alain Cachard, Alain Cachard, Jean Claude Pommier, Jean Claude Pommier, } "Nondestructive evaluation of material structure by second harmonic generation", Proc. SPIE 2782, Optical Inspection and Micromeasurements, (18 September 1996); doi: 10.1117/12.250809; https://doi.org/10.1117/12.250809
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