18 September 1996 Nondestructive evaluation of material structure by second harmonic generation
Author Affiliations +
Proceedings Volume 2782, Optical Inspection and Micromeasurements; (1996) https://doi.org/10.1117/12.250809
Event: Lasers, Optics, and Vision for Productivity in Manufacturing I, 1996, Besancon, France
Abstract
Second harmonic generation can be used to probe the microstructure of materials. This non-destructive all- optical method is applied to quantify the orientation of the micro-columns constituting aluminium nitride thin films. Very small tilt angles of the columns are easily detectable. This technique is applicable to the control of material structure during deposition.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Daniele Blanc, Alain Cachard, Jean Claude Pommier, "Nondestructive evaluation of material structure by second harmonic generation", Proc. SPIE 2782, Optical Inspection and Micromeasurements, (18 September 1996); doi: 10.1117/12.250809; https://doi.org/10.1117/12.250809
PROCEEDINGS
11 PAGES


SHARE
Back to Top