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18 September 1996 Optical flying-height testing of magnetic read-write heads
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Proceedings Volume 2782, Optical Inspection and Micromeasurements; (1996)
Event: Lasers, Optics, and Vision for Productivity in Manufacturing I, 1996, Besancon, France
Quality control in the production of rigid disk drives depends in part on accurate metrology of the read-write head. We review the established technologies for measuring the distance or flying height between the head and the rotating disk, and propose a new instrument based on polarization interferometry. The new instrument has excellent repeatability, high sensitivity at low flying height and in situ determination of the phase change on reflection.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Peter J. de Groot, Leslie L. Deck, James A. Soobitsky, and James F. Biegen "Optical flying-height testing of magnetic read-write heads", Proc. SPIE 2782, Optical Inspection and Micromeasurements, (18 September 1996);


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