18 September 1996 Polarization-based fringe projection interferometer for phase-stepping techniques
Author Affiliations +
Proceedings Volume 2782, Optical Inspection and Micromeasurements; (1996) https://doi.org/10.1117/12.250751
Event: Lasers, Optics, and Vision for Productivity in Manufacturing I, 1996, Besancon, France
We present newly developed, compact, self-contained fringe projection interferometer for use with phase step algorithms. The interferometer uses a polarization beam splitter and a computer controlled variable retarder to manage the phase shift. The well compensated path difference permits use of relatively low-coherence sources. The in-line setup contains no mechanical parts and provides a compact, rigid design and nearly perfect common path geometry. The phase shift is realized in a few milliseconds, which enables fast data collection. The interferometer can be used as a sinusoidal fringe projector for topography measurements, or as a shearing interferometer for testing optical elements. Other applications that use phase step technique and require similarly short data acquisition times, versatility and stability are also possible. Examples of surface topography measurements are presented.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Piotr Szwaykowski, Piotr Szwaykowski, } "Polarization-based fringe projection interferometer for phase-stepping techniques", Proc. SPIE 2782, Optical Inspection and Micromeasurements, (18 September 1996); doi: 10.1117/12.250751; https://doi.org/10.1117/12.250751


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