Polarization-based fringe projection interferometer for phase-stepping techniques

Piotr Szwaykowski

doi:10.1117/12.250751

18 September 1996 Polarization-based fringe projection interferometer for phase-stepping techniques

Piotr Szwaykowski

Author Affiliations +

Proceedings Volume 2782, Optical Inspection and Micromeasurements; (1996) https://doi.org/10.1117/12.250751
Event: Lasers, Optics, and Vision for Productivity in Manufacturing I, 1996, Besancon, France

Abstract

We present newly developed, compact, self-contained fringe projection interferometer for use with phase step algorithms. The interferometer uses a polarization beam splitter and a computer controlled variable retarder to manage the phase shift. The well compensated path difference permits use of relatively low-coherence sources. The in-line setup contains no mechanical parts and provides a compact, rigid design and nearly perfect common path geometry. The phase shift is realized in a few milliseconds, which enables fast data collection. The interferometer can be used as a sinusoidal fringe projector for topography measurements, or as a shearing interferometer for testing optical elements. Other applications that use phase step technique and require similarly short data acquisition times, versatility and stability are also possible. Examples of surface topography measurements are presented.

Citation Download Citation

Piotr Szwaykowski, Piotr Szwaykowski, } "Polarization-based fringe projection interferometer for phase-stepping techniques", Proc. SPIE 2782, Optical Inspection and Micromeasurements, (18 September 1996); doi: 10.1117/12.250751; https://doi.org/10.1117/12.250751

ACCESS THE FULL ARTICLE

PERSONAL SIGN IN
Full access may be available with your subscription

Email or Username Forgot your username?

Password Forgot your password?

Show

Remember Email/Username on this computer

Remember Password

No SPIE account? Create an account
or Institutional Sign In via Shibboleth

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $14.40

Non-members: $18.00 ADD TO CART

Show All Keywords

Keywords/Phrases

Search In:

Publication Years