18 September 1996 Surface deformation measurement by photothermal deflection technique
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Proceedings Volume 2782, Optical Inspection and Micromeasurements; (1996) https://doi.org/10.1117/12.250779
Event: Lasers, Optics, and Vision for Productivity in Manufacturing I, 1996, Besancon, France
Abstract
The photothermal deflection technique is applied to measure the surface deformation induced by laser absorption at the surface. The theory of the probe beam reflection due to the surface displacement is reviewed. The first experimental results show that this technique is able to measure displacements of a few Angstroms.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Mario Bertolotti, Roberto Li Voti, Stefano Paoloni, Concita Sibilia, G. L. Liakhou, "Surface deformation measurement by photothermal deflection technique", Proc. SPIE 2782, Optical Inspection and Micromeasurements, (18 September 1996); doi: 10.1117/12.250779; https://doi.org/10.1117/12.250779
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