Feedback interferometry with semiconductor laser for high-resolution displacement sensing

Silvano Donati; Sabina Merlo; Francesco Micolano

doi:10.1117/12.248490

26 August 1996 Feedback interferometry with semiconductor laser for high-resolution displacement sensing

Silvano Donati, Sabina Merlo, Francesco Micolano

Proceedings Volume 2783, Micro-Optical Technologies for Measurement, Sensors, and Microsystems; (1996) https://doi.org/10.1117/12.248490
Event: Lasers, Optics, and Vision for Productivity in Manufacturing I, 1996, Besancon, France

Abstract

We present the prototype of a laser feedback interferometer for displacement measurement with micrometric resolution and directional discrimination, which we propose for applications in industrial environment. The instrument incorporates a PC-interfaced electronic unit connected with the optical head, which is very compact thanks to the selected optical configuration and to the use of a semiconductor laser. Infrared as well as red emitting lasers have been used for operation on reflecting and diffusing targets.

Citation Download Citation

Silvano Donati, Sabina Merlo, and Francesco Micolano "Feedback interferometry with semiconductor laser for high-resolution displacement sensing", Proc. SPIE 2783, Micro-Optical Technologies for Measurement, Sensors, and Microsystems, (26 August 1996); https://doi.org/10.1117/12.248490

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