26 August 1996 High-resolution heterodyne interferometric rotation encoder with frequency-modulated laser diode
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Proceedings Volume 2783, Micro-Optical Technologies for Measurement, Sensors, and Microsystems; (1996) https://doi.org/10.1117/12.248489
Event: Lasers, Optics, and Vision for Productivity in Manufacturing I, 1996, Besancon, France
Abstract
A high-resolution interferometric rotation encoder has been developed and characterized. It is based on the principle of a heterodyne interferometer. The frequency shifting was done by modulation of the injection current of a laser diode and a fiber-optical delay line allowing a compact system design. Light wave aberrations produced by the scale (i.e. rotary grating disk) are pre-corrected by using computer-generated holograms (CGH). Combined analogue and digital signal processing allow high resolution as well as high measurement rates. The designed prototype yields a resolution of 0.03 arcsec (i.e. 25 bit) corresponding to 3 nm resolution of displacement of the 38 mm diameter disk-scale. The measuring rate of 1 MHz allows a rotation speed resolution of 0.013 rpm at a maximum speed of 300 rpm.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Pawel Drabarek, Michael van Keulen, Goetz Kuehnle, Siegbert Steinlechner, "High-resolution heterodyne interferometric rotation encoder with frequency-modulated laser diode", Proc. SPIE 2783, Micro-Optical Technologies for Measurement, Sensors, and Microsystems, (26 August 1996); doi: 10.1117/12.248489; https://doi.org/10.1117/12.248489
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