26 August 1996 High-resolution heterodyne interferometric rotation encoder with frequency-modulated laser diode
Author Affiliations +
Proceedings Volume 2783, Micro-Optical Technologies for Measurement, Sensors, and Microsystems; (1996) https://doi.org/10.1117/12.248489
Event: Lasers, Optics, and Vision for Productivity in Manufacturing I, 1996, Besancon, France
Abstract
A high-resolution interferometric rotation encoder has been developed and characterized. It is based on the principle of a heterodyne interferometer. The frequency shifting was done by modulation of the injection current of a laser diode and a fiber-optical delay line allowing a compact system design. Light wave aberrations produced by the scale (i.e. rotary grating disk) are pre-corrected by using computer-generated holograms (CGH). Combined analogue and digital signal processing allow high resolution as well as high measurement rates. The designed prototype yields a resolution of 0.03 arcsec (i.e. 25 bit) corresponding to 3 nm resolution of displacement of the 38 mm diameter disk-scale. The measuring rate of 1 MHz allows a rotation speed resolution of 0.013 rpm at a maximum speed of 300 rpm.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Pawel Drabarek, Pawel Drabarek, Michael van Keulen, Michael van Keulen, Goetz Kuehnle, Goetz Kuehnle, Siegbert Steinlechner, Siegbert Steinlechner, } "High-resolution heterodyne interferometric rotation encoder with frequency-modulated laser diode", Proc. SPIE 2783, Micro-Optical Technologies for Measurement, Sensors, and Microsystems, (26 August 1996); doi: 10.1117/12.248489; https://doi.org/10.1117/12.248489
PROCEEDINGS
11 PAGES


SHARE
Back to Top