26 August 1996 Integrated motion system for self-alignment of micro-optical devices
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Proceedings Volume 2783, Micro-Optical Technologies for Measurement, Sensors, and Microsystems; (1996) https://doi.org/10.1117/12.248481
Event: Lasers, Optics, and Vision for Productivity in Manufacturing I, 1996, Besancon, France
Abstract
The purpose of this paper is to investigate an integrated X/Y motion system, compatible with silicon process that will allow the positioning of micro-optical devices. The basic actuator, used for this system is referred as scratch drive actuator (SDA). SDA is able to produce a 1-D displacement, so, by combining several SDA, multi-degree of freedom motion is obtained. First, the SDA dimension dependent yield was analyzed. From this study, SDA with 50 micrometer long and 70 micrometer wide scratching area are appropriate for the integrated alignment system. According to these dimensions, various X/Y stages configurations are designed and fabricated as well as other actuated components such as long springs, integrated snapping devices and also nonrectangular shaped SDA. Two-dimensional motion of a 150 micrometer by 150 micrometer polysilicon stage have been demonstrated, proving the SDA out force is able to overcome friction effects of this kind of device. Active snapping system have been also successfully implemented. Control schemes for the X/Y motion and for the alignment are now under investigation.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Dominique Collard, Dominique Collard, Y. Fukuta, Y. Fukuta, T. Akiyama, T. Akiyama, Dominique Chauvel, Dominique Chauvel, Hiroyuki Fujita, Hiroyuki Fujita, } "Integrated motion system for self-alignment of micro-optical devices", Proc. SPIE 2783, Micro-Optical Technologies for Measurement, Sensors, and Microsystems, (26 August 1996); doi: 10.1117/12.248481; https://doi.org/10.1117/12.248481
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