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26 August 1996 Micro-optics for sensor applications
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Proceedings Volume 2783, Micro-Optical Technologies for Measurement, Sensors, and Microsystems; (1996)
Event: Lasers, Optics, and Vision for Productivity in Manufacturing I, 1996, Besancon, France
Our investigation is focused on microlens arrays for microsystems and sensor applications. Arrays of refractive lenses (2 micrometer to 5 mm lens diameter) have been fabricated by melting resist technology. Microlens arrays have been transferred in fused silica (reactive ion etching) and replicated in polycarbonate and polymer (embossing, casting). Lens arrays have been integrated into lithographic systems, sensors and neural networks.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Philippe Nussbaum, Reinhard Voelkel, Hans Peter Herzig, and Rene Daendliker "Micro-optics for sensor applications", Proc. SPIE 2783, Micro-Optical Technologies for Measurement, Sensors, and Microsystems, (26 August 1996);

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