Micro-optomechanical devices: an electrostatically actuated bending waveguide for optical coupling

Frederic Chollet; Michel de Labachelerie; Hiroyuki Fujita

doi:10.1117/12.248485

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26 August 1996 Micro-optomechanical devices: an electrostatically actuated bending waveguide for optical coupling

Frederic Chollet; Michel de Labachelerie; Hiroyuki Fujita

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Proceedings Volume 2783, Micro-Optical Technologies for Measurement, Sensors, and Microsystems; (1996) https://doi.org/10.1117/12.248485
Event: Lasers, Optics, and Vision for Productivity in Manufacturing I, 1996, Besancon, France

Abstract

A novel coupling structure between two waveguides is proposed. We use electromechanical actuation to change the gap between two superimposed waveguides. This in turn allows for evanescent wave coupling to induce complete energy exchange after typical length of 250 micrometers at a wavelength of 0.6328 micrometer. This device should work as a directional coupler and allow out of the plane interconnection opening the way to 3D coupling matrix. We present here the simulations (optical and mechanical) used to evaluate the device behavior and all its relevant geometrical parameters. Development of oxynitride waveguide using low pressure chemical vapor deposition is reported and also the silicon based process compatible with waveguides used to obtain a bending waveguide supporting structure with through-the-wafer contacted electrodes. Finally actuation of bending waveguide is also described and further developments are discussed.

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Frederic Chollet, Michel de Labachelerie, and Hiroyuki Fujita "Micro-optomechanical devices: an electrostatically actuated bending waveguide for optical coupling", Proc. SPIE 2783, Micro-Optical Technologies for Measurement, Sensors, and Microsystems, (26 August 1996); https://doi.org/10.1117/12.248485