26 August 1996 New integrated optics displacement sensor in glass
Author Affiliations +
Proceedings Volume 2783, Micro-Optical Technologies for Measurement, Sensors, and Microsystems; (1996) https://doi.org/10.1117/12.248503
Event: Lasers, Optics, and Vision for Productivity in Manufacturing I, 1996, Besancon, France
In this paper we present an integrated optics displacement sensor with an interference head, where one-dimensional fringe pattern is created, allowing multiphase detection. Waveguides placed in the interference pattern are sampling four ideally pi/2 phase shifted signals. The four phase detection allows us to overcome the difficulties of intensity and contrast variation by suitable electronic treatment and offers potentially very high resolution displacement measurements. The interference fringe spacing and therefore equal phase shifts between the signals is controlled by the geometrical parameters of the mask design and therefore insensitive to fabrication tolerances.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Thiemo Lang, Thiemo Lang, Denis Genon-Catalot, Denis Genon-Catalot, Pascal Dandrea, Pascal Dandrea, Isabelle Schanen Duport, Isabelle Schanen Duport, Pierre Benech, Pierre Benech, } "New integrated optics displacement sensor in glass", Proc. SPIE 2783, Micro-Optical Technologies for Measurement, Sensors, and Microsystems, (26 August 1996); doi: 10.1117/12.248503; https://doi.org/10.1117/12.248503


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