One-level gray-tone lithography: mask data preparation and pattern transfer

Klaus Reimer; Hans Joachim Quenzer; Rita Demmeler; Bernd Wagner

doi:10.1117/12.248506

26 August 1996 One-level gray-tone lithography: mask data preparation and pattern transfer

Klaus Reimer, Hans Joachim Quenzer, Rita Demmeler, Bernd Wagner

Proceedings Volume 2783, Micro-Optical Technologies for Measurement, Sensors, and Microsystems; (1996) https://doi.org/10.1117/12.248506
Event: Lasers, Optics, and Vision for Productivity in Manufacturing I, 1996, Besancon, France

Abstract

This paper reports on a methodology for fabrication of arbitrarily shaped structures using technologies common to standard IC manufacturing processes. Particular emphasis is put on the design and use of halftone transmission masks for the lithography step required in the fabrication process of mechanical, optical or electronics components. The algorithms to transfer an initial height profile into a design representation in the common data format GDSII are discussed. This set of data could be used directly by a commercial mask shop. The great data amount of a reticle layout has been reduced significantly by a first order data compaction. The possibly nonlinear influences of the different process steps on the transfer function have been regarded. The specific parameters for the mask making and the resist process are determined. Several components like shaped gratings or lenses have been realized in resist up to 10 micrometers thick. In the field of transferring the pattern into a substrate material like silicon or glass, a dry etching process was evaluated.

Citation Download Citation

Klaus Reimer, Hans Joachim Quenzer, Rita Demmeler, and Bernd Wagner "One-level gray-tone lithography: mask data preparation and pattern transfer", Proc. SPIE 2783, Micro-Optical Technologies for Measurement, Sensors, and Microsystems, (26 August 1996); https://doi.org/10.1117/12.248506

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available