Two-frequency laser interferometric path measuring system for extreme velocities with high accuracy

Jochen Mueller; Matthias Chour

doi:10.1117/12.248592

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26 August 1996 Two-frequency laser interferometric path measuring system for extreme velocities with high accuracy

Jochen Mueller, Matthias Chour

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Proceedings Volume 2787, Rapid Prototyping; (1996) https://doi.org/10.1117/12.248592
Event: Lasers, Optics, and Vision for Productivity in Manufacturing I, 1996, Besancon, France

Abstract

A two-frequency laser interferometric path measuring system is introduced which has been developed especially for the precision rapid-positioning systems of micro lithographic large-scale instruments and for ultra-precision technology. The modulation frequency of 640 MHz, generated by a highly stabilized He-Ne-laser allows -- in combination with a novel HF signal processing method -- measuring velocities up to 6.4 m/s without 'loosing' even the least increment (10 nm). It is further metrological merit that the least increment is not generated by an additional NF interpolation -- as was usual so far -- but aries from the parallel processing in the HF part.

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Jochen Mueller and Matthias Chour "Two-frequency laser interferometric path measuring system for extreme velocities with high accuracy", Proc. SPIE 2787, Rapid Prototyping, (26 August 1996); https://doi.org/10.1117/12.248592

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