24 July 1996 Application of phase-sensitive optical system for soft defect detection
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Proceedings Volume 2793, Photomask and X-Ray Mask Technology III; (1996) https://doi.org/10.1117/12.245247
Event: Symposium on Photomask and X-Ray Mask Technology, 1996, Kawasaki City, Japan
Abstract
To attain a better yield, the performance requirements for the inspection equipment have been getting more rigid among mask manufacturers. Recently, we have developed the operational principle of the phase sensitive optical system based on the differential interference contrast (DIC) technique. This optical system has capability to suppress the circuit pattern images, and can enhance the contrast between the images of the contamination and the defect-less circuit patterns.
© (1996) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Tsuneyuki Hagiwara, Kouichirou Komatsu, "Application of phase-sensitive optical system for soft defect detection", Proc. SPIE 2793, Photomask and X-Ray Mask Technology III, (24 July 1996); doi: 10.1117/12.245247; https://doi.org/10.1117/12.245247
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