Investigation of phase-shift mask shifter defect printability and inspection techniques

Yasuhiro Koizumi; Daniel L. Lopez

doi:10.1117/12.245241

24 July 1996 Investigation of phase-shift mask shifter defect printability and inspection techniques

Yasuhiro Koizumi, Daniel L. Lopez

Proceedings Volume 2793, Photomask and X-Ray Mask Technology III; (1996) https://doi.org/10.1117/12.245241
Event: Symposium on Photomask and X-Ray Mask Technology, 1996, Kawasaki City, Japan

Abstract

Establishing an effective inspection method for PSM's shifter defects is a very important factor in successful production of PSM under i-line and DUV for 0.25 μm process rules. We have used a PSM with programmed shifter defects to confirm the minimum printable defect size under 0.25 μm rule process environment using i-line and DUV steppers. The same plate was then inspected by a special-detection experimental transmitted and reflected(ETR) and KLA3O1 D/D inspection system which KLA has developed in cooperation with Hitachi to evaluate its detection performance on those printable defects. We report that characteristic of this inspection system, which uses both transmitted and reflected light and special detection algorithm, is an effective tool. We will be able to supply defect free PSM for reliable process of 0.25 μm rule.

Citation Download Citation

Yasuhiro Koizumi and Daniel L. Lopez "Investigation of phase-shift mask shifter defect printability and inspection techniques", Proc. SPIE 2793, Photomask and X-Ray Mask Technology III, (24 July 1996); https://doi.org/10.1117/12.245241

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available